Released on: January 17, 2011, 5:28 am
Author:
ION Systems
Industry:
Semiconductors
Model 4214 In-line Ultra Clean Nitrogen Ionizer Meets Extended ISO Class 1 Cleanliness Requirements for High Purity Processes
Alameda, Calif., Jan. 2011, ION Systems, an ITW Company, the leader in static charge neutralization and control products for high tech industries, announces the In-line Ultra Clean Nitrogen Ionizer, Model 4214, the first in-line ionizer specifically designed to ionize a nitrogen gas flow in ultra clean medical, semiconductor, or other high purity processes where static charge generation is an issue.
The Model 4214 In-line Ultra Clean Nitrogen Ionizer was developed to provide a
solution to the problem of materials readily charging to 30-40 kV when handled in
pure nitrogen environments. Many processes in the medical, semiconductor, and
electronics industries are carried out in five 9's pure nitrogen environments
(99.999% nitrogen). Nitrogen ensures a clean, non-oxidizing environment that enables
critical processes to be carried out without contamination issues. The dry nitrogen
environment, however, encourages static charge generation, which can cause particles
contamination through electrostatic attraction, or damage from ESD events. The Model
4214 ionizer, by providing a stream of ionized nitrogen, can effectively remove
static charge from products to minimize particle attraction and ESD events. Nitrogen
cannot be ionized with standard ionization equipment designed for use in ambient air
or CDA environments. The Model 4214 provides the user with the first small format
ionizer that ionizes the actual nitrogen molecules instead of the trace impurity
gases.
In addition to ionizing pure nitrogen, the Model 4214 is also the world's first corona ionizer that meets Extended ISO Class 1 cleanliness. Using formulas in the ISO 14644-1 standard, ION Systems has extrapolated the allowable particles down to 0.01 micron (10 nm) in size. These smaller particles which are not covered by ISO 14644-1 can be especially harmful to semiconductor devices with 32 nm or below technology nodes.
The Model 4214 In-line Ultra Clean Nitrogen Ionizer includes several features and benefits:
• Single Crystal Silicon (SCSi) emitter point and an internal particle containment system provides clean technology for 22 nm and below nodes
• Self-balancing ionization eliminates difficult calibration and setup
• Microprocessor-controlled LED visual and remote alarms allow for local and remote system level status
• Compact size fits in the most constrained tool applications
• Cost efficient operation with nitrogen saving Standby Mode reduces gas flow while maintaining ability to ignite corona on demand for quick ionization start up
In addition to the semiconductor industry, other industries that use pure nitrogen environments and can benefit from ultra-clean ionized nitrogen streams include medical, biotech and electronics manufacturing.
The Model 4214 In-line Ultra Clean Nitrogen Ionizer, introduced at SEMICON Japan 2010, is available now to ship worldwide.
About ION Systems
ION Systems, an ISO 9001 certified company, providing electrostatic energy
management solutions to help high-tech, medical, and electronics manufacturers
develop and manage their static budgets for maximum yield, throughput and
profitability. The company develops state-of-the-art technology, providing a wide
range of products and services for a variety of applications from cleanrooms to
process equipment to electronics assembly areas. ION Systems has an extensive global
support network and is headquartered at 1750 North Loop Road, Alameda, CA 94502.
Additional product information can be accessed through our website at www.ion.com/products/ionization/products/4214.html.
Contact Details: Steve Heymann
Senior Director, Product Marketing
ION Systems
1750 North Loop Rd.
Alameda, CA 94502
Tel: 510-217-0602
Fax: 510-217-0484
Toll: 800-367-2452
sheymann@ion.com
www.ion.com